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Updated: Jun 16, 2026
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Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Summary
Optically recorded Fresnel zone plates serve as effective laser scanners. This study analyzes their aberrations at large angles and demonstrates a method to correct wavefront errors, enabling improved laser beam scanning applications.
Area of Science:
- Optics and Photonics
- Laser Technology
- Optical Engineering
Background:
- Optically recorded Fresnel zone plates (FZPs) possess suitable spatial frequency characteristics for laser beam scanning.
- These grating scanners are easily fabricated and capable of scanning over large cone angles.
Purpose of the Study:
- To investigate the use of optically recorded FZPs as laser scanners.
- To analyze the aberration properties of FZPs at large deflection angles.
- To propose and demonstrate a method for correcting wavefront errors in FZP-based laser scanning.
Main Methods:
- Analysis of aberration properties of optically recorded FZPs.
- Development of a wavefront error correction method.
- Experimental demonstration of the proposed correction method's feasibility.
Main Results:
- Severe aberrations of the diffracted laser beam occur at large deflection angles when using FZPs.
- A method for mitigating wavefront errors caused by FZPs was successfully discussed and demonstrated.
- The feasibility of correcting aberrations for improved laser beam scanning was confirmed.
Conclusions:
- Optically recorded FZPs are viable for laser scanning applications.
- Aberrations at large deflection angles are a significant challenge for FZP scanners.
- The proposed wavefront error correction method shows promise for enhancing FZP-based laser scanning systems.
