Updated: Jun 15, 2026

Comprehensive Characterization of Extended Defects in Semiconductor Materials by a Scanning Electron Microscope
Published on: May 28, 2016
G Zschornack1, F Grossmann, U Kentsch
1Institute of Applied Physics, Dresden University of Technology, D-01062 Dresden, Germany. g.zschornack@fzd.de
Latest developments in Dresden electron beam ion sources offer compact, affordable table-top tools for producing highly charged ions. These sources are valuable for medical particle therapy, charge breeding, and advanced ion beam applications.
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