Development of a laser-focused ion beam combination machine

We have developed a laser and focused ion beam (FIB) compound system to process an optical component device with an ultrafine precision minute surface structure and a micromedical device. This machine consists of an FIB and three types of lasers with an atomic force microscope. This system can fabricate decamicrometer area by laser and submicrometer area by FIB at one chuck. When processing the press mold die of a microlens array (10x10) in a glasslike carbon with a femtosecond laser, a diameter of 3.2 microm and depth of 0.43 microm are obtained. However, the surface roughness is more than Rz=0.5 microm. After this process, we finished this surface with the use of the FIB. As a result, the surface roughness is less than Rz=0.05 microm.