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Fabrication Process of Silicone-based Dielectric Elastomer Actuators
Published on: February 1, 2016
Improved piezoelectric actuators for use in high-speed pulsed valves
David L Proctor1, Daniel R Albert, H Floyd Davis
1Department of Chemistry and Chemical Biology, Baker Laboratory, Cornell University, Ithaca, New York 14853-1301, USA.
The Review of Scientific Instruments
|March 3, 2010
Summary
New piezoelectric actuators for Proch-Trickl pulsed gas valves offer superior chemical resistance and shorter pulses, reducing gas consumption and chamber pressure in molecular beam experiments.
Area of Science:
- Experimental physics
- Materials science
Background:
- Proch-Trickl pulsed gas valves are crucial for pulsed molecular beam experiments.
- The original commercial actuators for these valves are no longer available.
- Existing alternatives lack the performance and durability of the original design.
Purpose of the Study:
- To design and assemble superior piezoelectric actuators for Proch-Trickl pulsed gas valves.
- To improve upon the performance and chemical resistance of discontinued commercial actuators.
- To enable active adjustment of actuator closed position.
Main Methods:
- Assembly of novel piezoelectric actuators using various dual piezo configurations.
- Testing actuator performance against original specifications and commercial alternatives.
- Implementing electrical isolation for voltage bias control.
Main Results:
- The new actuators match the performance of the original commercial design.
- New actuators exhibit significantly enhanced resistance to chemical attack.
- Dual piezo configurations reliably produce shorter gas pulses.
- Shorter pulses lead to reduced gas consumption and lower source chamber pressures.
- Electrical isolation allows for active adjustment of the closed position via voltage bias.
Conclusions:
- The developed piezoelectric actuators are a viable and superior replacement for the discontinued commercial actuators.
- The dual piezo design offers enhanced control over pulse duration, leading to improved experimental efficiency.
- The ability to actively adjust the closed position provides greater experimental flexibility.

