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Published on: May 25, 2021
A calorimetric probe for plasma diagnostics.
Marc Stahl1, Thomas Trottenberg, Holger Kersten
1Institute of Experimental and Applied Physics, Christian-Albrechts-University Kiel, D-24098 Kiel, Germany.
The Review of Scientific Instruments
|March 3, 2010
Summary
A new calorimetric probe measures substrate power in plasma diagnostics. Improved calibration using monoenergetic electrons enhances accuracy for analyzing heating power composition from ions and neutral atoms.
Area of Science:
- Plasma Physics
- Materials Science
Background:
- Accurate measurement of power deposition in plasma-surface interactions is crucial for understanding material erosion and plasma processing.
- Existing calorimetric probes require precise calibration for reliable quantification of heating power components.
Purpose of the Study:
- To introduce a novel calorimetric probe for plasma diagnostics.
- To develop and validate an improved calibration technique for enhanced accuracy.
- To demonstrate the probe's capability in analyzing heating power composition.
Main Methods:
- Development of a calorimetric probe with a biasable test substrate.
- Implementation of a new calibration method using monoenergetic electrons at low pressure.
- Experimental validation involving simultaneous ion and energetic neutral atom bombardment.
Main Results:
- The calorimetric probe successfully measures power absorbed by the test substrate.
- The new calibration technique significantly improves the accuracy of power measurements.
- The probe distinguishes contributions from both ion and energetic neutral atom heating.
Conclusions:
- The developed calorimetric probe offers a reliable method for plasma power diagnostics.
- The improved calibration technique enhances the understanding of plasma-material interactions.
- This tool aids in optimizing plasma processes by quantifying heating power sources.
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