Related Experiment Video
Updated: Jun 15, 2026
08:01
Spectral and Angle-Resolved Magneto-Optical Characterization of Photonic Nanostructures
Published on: November 21, 2019
Nondestructive analysis of coated periodic nanostructures from optical data
T H Ghong1, S-H Han, J-M Chung
1Nano-optical Property Laboratory and Department of Physics, Kyung Hee University, Seoul 130-701, Korea.
Optics Letters
|March 3, 2010
Summary
This study enhances rigorous coupled-wave analysis for optical nondestructive measurements of integrated circuit structures. The method accurately determines oxide layer thicknesses in complex, multi-layered periodic structures.
Area of Science:
- Materials Science
- Optics
- Nanotechnology
Background:
- Accurate, nondestructive measurement of periodic structures is vital for integrated-circuit fabrication.
- Rigorous coupled-wave analysis (RCWA) is a key technique, typically modeling samples as single layers.
- Existing RCWA methods have limitations in analyzing complex, multi-layered structures.
Purpose of the Study:
- To extend rigorous coupled-wave analysis (RCWA) for structures with overlayers.
- To demonstrate a quantitative approach for determining oxide layer thicknesses in integrated circuits.
- To analyze both deliberately and naturally oxidized structures.
Main Methods:
- Utilized optical data for analysis.
- Extended rigorous coupled-wave analysis (RCWA) to model multi-layered samples.
- Applied the extended RCWA to determine oxide thicknesses.
Main Results:
- Successfully extended RCWA capabilities to analyze structures with overlayers.
- Quantitatively determined the thicknesses of top, sidewall, and bottom oxides.
- Validated the approach on both deliberately and naturally oxidized structures.
Conclusions:
- The enhanced RCWA provides accurate, nondestructive determination of periodic structure profiles.
- This method is effective for analyzing complex oxide layers in integrated-circuit technology.
- The approach offers a significant advancement for in-line process control and metrology.
