Self-assembly from milli- to nanoscales: methods and applications.

M Mastrangeli1, S Abbasi, C Varel

  • 1IMEC, Kapeldreef 75, 3001 Leuven, Belgium.

Journal of Micromechanics and Microengineering : Structures, Devices, and Systems
|March 9, 2010
PubMed
Summary

Self-assembly offers a parallel fabrication solution for microelectromechanical systems (MEMS) and nanodevices, overcoming limitations of serial methods. This review explores various self-assembly techniques for creating complex 2D and 3D structures.

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