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Wide vacuum pressure range monitoring by Pirani SAW sensor

Pascal Nicolay1, Omar Elmazria, Frederic Sarry

  • 1LPMIA, UMR 7040 CNRS, Nancy University, 54506 Vandoeuvre-lès-Nancy, France

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
|March 10, 2010
PubMed

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