Patterning and templating for nanoelectronics.

Kosmas Galatsis1, Kang L Wang, Mihri Ozkan

  • 1FCRP Center on Functional Engineered Nano Architectonics, University of California, Los Angeles, CA 90095-1595, USA. kos@ee.ucla.edu

Summary

The semiconductor industry is exploring new patterning techniques beyond traditional lithography to continue Moore's Law scaling. While not replacing current methods for silicon integrated circuits, these novel approaches may enable advanced nanoarchitectures.

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