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Nanomoulding of Functional Materials, a Versatile Complementary Pattern Replication Method to Nanoimprinting
Published on: January 23, 2013
Patterning and templating for nanoelectronics.
Kosmas Galatsis1, Kang L Wang, Mihri Ozkan
1FCRP Center on Functional Engineered Nano Architectonics, University of California, Los Angeles, CA 90095-1595, USA. kos@ee.ucla.edu
Advanced Materials (Deerfield Beach, Fla.)
|March 11, 2010
Summary
The semiconductor industry is exploring new patterning techniques beyond traditional lithography to continue Moore's Law scaling. While not replacing current methods for silicon integrated circuits, these novel approaches may enable advanced nanoarchitectures.
Area of Science:
- Nanoscience and Nanotechnology
- Semiconductor Manufacturing
- Materials Science
Background:
- The 32 nm complementary metal oxide semiconductor (CMOS) technology node, utilizing 193 nm lithography, will soon enable microprocessors with over 2 billion transistors.
- Moore's Law is challenged by the limitations of conventional top-down patterning, necessitating the exploration of alternative techniques.
- Current alternative patterning methods may not outperform traditional lithography for silicon integrated circuits but show promise for novel nanoarchitectures.
Discussion:
- Evaluation of alternative patterning methods for advanced nanoarchitectures.
- Benchmarking criteria for assessing patterning techniques against CMOS scaling.
- Focus on methods developed at the Center on Functional Engineered Nano Architectonics.
Key Insights:
- Most alternative patterning techniques are unlikely to supersede conventional lithography for silicon integrated circuits.
- Alternative patterning approaches offer potential functional advantages for next-generation information processing nanoarchitectures.
- Emerging nanoarchitectures include cellular, bio-inspired, magnetic dot logic, and crossbar schemes.
Outlook:
- Continued research into alternative patterning for specialized nanoelectronic applications.
- Development of new benchmarking standards for emerging patterning technologies.
- Potential for breakthroughs in information processing beyond traditional CMOS scaling.

