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Updated: Jun 15, 2026

Soft Lithographic Functionalization and Patterning Oxide-free Silicon and Germanium
Published on: December 16, 2011
N S Losilla1, J Martinez, E Bystrenova
1Instituto de Microelectrónica de Madrid: CSIC, Isaac Newton 8, Tres Cantos, Madrid, Spain. nuria@imm.cnm.csic.es
Local oxidation nanolithography was used to pattern pentacene, creating nanostructures for antibody deposition. Parallel processing achieved sub-micrometer patterns rapidly, enabling new applications in nanoscale patterning.
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