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Quantitative surface topography determination by Nomarski reflection microscopy. 2: Microscope modification,

J S Hartman, R L Gordon, D L Lessor

|March 18, 2010

Summary

This summary is machine-generated.

This study details using Nomarski differential interference contrast microscopy to measure sample topography. Researchers modified a commercial microscope for quantitative surface analysis, offering a practical guide for metallography labs.

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Area of Science:

Materials Science
Optical Microscopy
Surface Metrology

Background:

Traditional microscopy methods may lack quantitative topographic data.
Nomarski differential interference contrast (DIC) microscopy offers phase contrast imaging.
Accurate surface topography measurement is crucial in materials science.

Purpose of the Study:

To present the application of reflective Nomarski DIC microscopy for quantitative sample topography.
To provide a theoretical basis and practical implementation guide.
To enable accurate surface slope measurements on planar samples.

Main Methods:

Review of theoretical principles of Nomarski DIC microscopy.
Experimental modification and characterization of a commercial Nomarski microscope.
Application of the modified system for quantitative topography and slope measurements.

Main Results:

Demonstrated successful modification of a commercial microscope for quantitative topography.
Validated the system's capability for measuring slopes on flat planar samples.
Provided a comprehensive procedure for practical implementation in metallography.

Conclusions:

Reflective Nomarski DIC microscopy can be effectively adapted for quantitative sample topography determination.
The developed methodology offers a valuable tool for both theoretical and practical applications in microscopy and metallography.
This approach enhances surface analysis capabilities in materials science laboratories.