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Updated: Jun 14, 2026

Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators
Published on: August 8, 2025
Quantum confinement, surface roughness, and the conduction band structure of ultrathin silicon membranes
Feng Chen1, Edwin B Ramayya, Chanan Euaruksakul
1University of Wisconsin-Madison, Madison, Wisconsin 53706, USA.
Abstract:
We report direct measurements of changes in the conduction-band structure of ultrathin silicon nanomembranes with quantum confinement. Confinement lifts the 6-fold-degeneracy of the bulk-silicon conduction-band minimum (CBM), Delta, and two inequivalent sub-band ladders, Delta(2) and Delta(4), form. We show that even very small surface roughness smears the nominally steplike features in the density of states (DOS) due to these sub-bands. We obtain the energy splitting between Delta(2) and Delta(4) and their shift with respect to the bulk value directly from the 2p(3/2)-->Delta transition in X-ray absorption. The measured dependence of the sub-band splitting and the shift of their weighted average on degree of confinement is in excellent agreement with theory, for both Si(001) and Si(110).
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