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Electrical Conduction Properties of Hydrogenated Amorphous Carbon Films with Different Structures.

Masashi Tomidokoro1, Sarayut Tunmee2, Ukit Rittihong2

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This study reveals how the structure of hydrogenated amorphous carbon (a-C:H) films dictates their electrical conduction. Variable-range hopping dominates at low temperatures, transitioning to band conduction at higher temperatures.

Keywords:
CVD depositionelectrical conductionhydrogenated amorphous carbon filmnear-edge X-ray absorption fine structurevariable range hopping

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Area of Science:

  • Materials Science
  • Condensed Matter Physics
  • Solid State Chemistry

Background:

  • Hydrogenated amorphous carbon (a-C:H) films exhibit diverse optical and electrical properties.
  • The precise electrical conduction mechanism in a-C:H films remains incompletely understood, despite its dependence on film structure.

Purpose of the Study:

  • To elucidate the relationship between the microstructure of a-C:H films and their electrical conduction mechanisms.
  • To investigate how varying deposition conditions influence the electrical properties.

Main Methods:

  • Preparation of three distinct types of a-C:H films.
  • Evaluation of film structures using near-edge X-ray absorption fine structure (NEXAFS) to determine sp2/(sp2 + sp3) ratios.
  • Analysis of conductivity-temperature relationships to identify conduction mechanisms.

Main Results:

  • Variable-range hopping (VRH) was identified as the primary conduction mechanism at low temperatures.
  • A transition to thermally activated band conduction was observed at higher temperatures.
  • A microstructural model for a-C:H was developed, comprising sp2 and sp3 carbon clusters, hydrogen atoms, and dangling bonds.

Conclusions:

  • The electrical conduction parameters in a-C:H films are significantly influenced by carrier transport pathways among microstructural clusters.
  • Understanding the interplay between film structure and conduction mechanisms is crucial for tailoring a-C:H properties.