Nanogenerators based on ZnO or TiO2 oxides

Recently, an approach for converting nanoscale mechanical energy into electrical energy has been suggested by using piezoelectric zinc oxide (ZnO) nanowire arrays. Such devices have been shown to convert ultrasonic energy into electric energy by a deflection of the nanowires via a corrugated electrode operated up and down by the ultrasound. A typical approximately 1 pW output power for a device of a approximately 1 mm2 area and a density of approximately 10(7)/mm2 nanowires can be obtained. In order to reach the approximately 10 nW power needed to operate a nanodevice, nanogenerators of this kind need to be optimized. With the aim of fabricating low cost to efficiency ratio nanogenerators, we have considered ZnO films grown by an electrochemical technique, based on the direct precipitation of Zn hydroxide on a conducting ITO/glass substrate and subsequent heat treatment, and TiO2 films deposited from a colloidal suspension of anatase/rutile commercial powders. These methods allowed us to obtain disordered but quite uniform arrays distributed on the surface of the substrate. Preliminary results on the electrical properties are presented. Under input mechanical strain we find output powers of approximately 10(-9)/cm2 W, which are comparable to those obtained with the ZnO nanoarrays. Possible interpretations of results in terms of piezoelectricity (ZnO) and incipient ferroelectricity (TiO2) are presented and improvements of the devices are discussed.