Enhanced optical properties of TiO2 nanoceramic films by oxygen atmosphere

TiO2 nanoceramic films were deposited on glasses by rf magnetron sputtering and corresponded to nanocrystalline anatase. The porosity and surface roughness decreased with the oxygen pressure. The optical transmission of TiO2 nanoceramic films obviously increased with the decrease of film thickness or the increase of oxygen pressure, especially in the visible region. Moiré deflectometry was used to measure the nonlinear refractive indices of TiO2 films deposited in a mixed Ar-O2 atmosphere. The nonlinear refractive index was measured to be of the order of 10(-8) cm2 W(-1) and the change in refractive index was of the order of 10(-5). As the oxygen pressure increased, the transparent TiO2 film exhibited a high linear refractive index, a low stress and a low stress-optical coefficient.