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Updated: Jun 14, 2026

Fabrication and Characterization of Superconducting Resonators
Published on: May 21, 2016
Siva Yegnanarayanan1, Mohammad Soltani, Qing Li
1School of Electrical and Computer Engineering, Georgia Institute of Technology, 777 Atlantic Dr NW, Atlanta, Georgia 30332, USA.
We developed ultra-compact silicon microresonators on CMOS-compatible substrates for enhanced light-matter interactions. These devices offer high performance for applications in sensing, optical processing, and lasers.
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