Generalized method for calculating astigmatism of the unit-magnification multipass system

Kexin Chen1, Huaidong Yang, Liqun Sun

  • 1State Key Laboratory of Precision Measurement Technology and Instruments, Tsinghua University, Beijing 100084, China. ckx03@mails.tsinghua.edu.cn

Applied Optics
|April 2, 2010
PubMed
Summary

A new method accurately calculates astigmatism in unit-magnification multipass systems (UMS). This optical design approach improves imaging quality and reduces RMS spot size compared to previous methods.

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