All-purpose finite element formulation for arbitrarily shaped crossed-gratings embedded in a multilayered stack.

Guillaume Demésy1, Frédéric Zolla, André Nicolet

  • 1Institut Fresnel, Université Aix-Marseille, Ecole Centrale Marseille, Campus de Saint-Jérôme,13013 Marseille, France. guillaume.demesy@fresnel.fr

Summary

We developed a new finite element method to calculate light diffraction by complex gratings in multilayered structures. This accurate and efficient method shows remarkable convergence, even with coarse meshes.

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