Scanning Electron Microscopy
Electron Microscope Tomography and Single-particle Reconstruction
Transmission Electron Microscopy
Overview of Electron Microscopy
Atomic Force Microscopy
Overview of Microscopy Techniques
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Updated: Jun 13, 2026

Quantitative Atomic-Site Analysis of Functional Dopants/Point Defects in Crystalline Materials by Electron-Channeling-Enhanced Microanalysis
Published on: May 10, 2021
Naoya Shibata1, Yuji Kohno, Scott D Findlay
1Institute of Engineering Innovation, School of Engineering, The University of Tokyo, Bunkyo, Tokyo 113-8656, Japan. shibata@sigma.t.u-tokyo.ac.jp
A novel detector for atomic-resolution scanning transmission electron microscopy (STEM) enables simultaneous acquisition of 16 images. This breakthrough allows for enhanced electron scattering analysis and new imaging possibilities in materials science.
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