Approximate analytic astigmatism of unit-magnification multipass system

Kexin Chen1, Huaidong Yang, Liqun Sun

  • 1State Key Laboratory of Precision Measurement Technology and Instruments,Tsinghua University, Beijing 100084, China. ckx03@mails.tsinghua.edu.cn

Applied Optics
|April 23, 2010
PubMed
Summary

We developed a novel method to accurately estimate analytic astigmatism in unit-magnification multipass systems (UMS). This approach significantly improves astigmatism correction efficiency and optical design for UMS.