Novel automatic electrochemical-mechanical polishing (ECMP) of metals for scanning electron microscopy

J Tiley1, K Shiveley, G B Viswanathan

  • 1Air Force Research Laboratory, Materials and Manufacturing, Wright-Patterson AFB, OH 45433, USA. jaimie.tiley@wpafb.af.mil

Micron (Oxford, England : 1993)
|May 4, 2010
PubMed