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Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station

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Aspherical mirror testing with an area detector array.

|May 11, 2010

Summary

This summary is machine-generated.

A novel interferometer method accurately tests deep aspherical surfaces without special optics. This fringe-scanning technique measures surface shape by calculating phase differences, simplifying complex optical testing.

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Area of Science:

Optical Engineering
Metrology
Surface Science

Background:

Accurate testing of deep aspherical surfaces is challenging.
Traditional methods often require complex and expensive optical components like null lenses or holographic elements.

Purpose of the Study:

To present a novel, high-accuracy method for testing deep aspherical surfaces.
To eliminate the need for aspherical reference surfaces, null lenses, or holograms in interferometric testing.

Main Methods:

Utilizes an interferometer combined with an area array sensor.
Employs a fringe-scanning phase-detecting technique.
Calculates the object-wavefront phase to determine surface shape.

Main Results:

Demonstrates high accuracy in testing deep aspherical surfaces.
Successfully tested an f/3, 200-mm diameter parabolic mirror.
Generates a sag difference map comparing the measured surface to an ideal aspherical surface.

Conclusions:

The presented method offers a simplified and accurate approach to aspherical surface metrology.
This technique is versatile and applicable to various deep aspherical optics.