Electronic Distance Measuring Instruments
Interference: Path Lengths
You might also read
Articles linked to this work by shared authors, journal, and citation graph.
Updated: Jun 12, 2026

Implementation of a Reference Interferometer for Nanodetection
Published on: April 26, 2014
Two-wavelength phase-shifting interferometry precisely measures step features using a synthesized wavelength. This technique enhances measurement accuracy and dynamic range for surface topography analysis.
Area of Science:
Background:
Purpose of the Study:
Main Methods:
Main Results:
Conclusions: