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Updated: Jun 12, 2026

Non-equilibrium Microwave Plasma for Efficient High Temperature Chemistry
Published on: August 1, 2017
Control of electron temperature and space potential gradients by superposition of thermionic electrons on electron
Chanho Moon1, Toshiro Kaneko, Shuichi Tamura
1Department of Electronic Engineering, Tohoku University, Sendai 980-8579, Japan.
Abstract:
An electron temperature gradient (ETG) is formed perpendicular to the magnetic field lines by superimposing low-temperature thermionic electrons emitted from a tungsten hot plate upon high-temperature electrons of an electron cyclotron resonance plasma, which pass through two different-shaped mesh grids. The radial profile of the plasma space potential can be controlled independent of the ETG by changing the bias voltages of the hot plate.
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