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Updated: Jun 12, 2026

15:25
Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
Published on: February 4, 2018
Abstract:
We describe here the design and operation of voltage tunable wavelength filters fabricated in titanium diffused LiNbO(3). The devices, based on the nonsymmetric interferometer, have channel separations of 11-31 nm at lambda= 1300 nm, and tuning rates of 3-10 nm/V. The periodic wavelength response of these filters allows them to be cascaded to combine or separate 2(N) channels in N stages.
