Related Experiment Video
Updated: Jun 12, 2026

10:39
Measurement of X-ray Beam Coherence along Multiple Directions Using 2-D Checkerboard Phase Grating
Published on: October 11, 2016
Blazed x-ray reflection gratings fabricated by electron beam lithography
Applied Optics
|June 18, 2010
Abstract:
We show that blazed gratings with well-controlled extremely small vertical dimensions can be made in electronresist (PMMA) using electron beam lithography.
More Related Videos
12:08Fabrication of High Contrast Gratings for the Spectrum Splitting Dispersive Element in a Concentrated Photovoltaic System
Published on: July 18, 2015
10:25Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope
Published on: September 14, 2018