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Published on: October 11, 2016

Blazed x-ray reflection gratings fabricated by electron beam lithography

H Andersson, J Romijn, E van der Drift

    Applied Optics
    |June 18, 2010
    PubMed

    Abstract:

    We show that blazed gratings with well-controlled extremely small vertical dimensions can be made in electronresist (PMMA) using electron beam lithography.

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