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Absolute sphericity measurement.

K E Elssner, R Burow, J Grzanna

    Applied Optics
    |June 18, 2010
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    Summary
    This summary is machine-generated.

    This study reviews conventional methods for optical surface sphericity testing, assessing their real-time interferometry suitability. A digital filtering technique is presented to reduce measurement errors like coherent noise.

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    Area of Science:

    • Optical Engineering
    • Metrology
    • Interferometry

    Background:

    • Conventional methods for absolute sphericity testing of optical surfaces exist.
    • Real-time interferometry applications of these methods require further investigation.

    Purpose of the Study:

    • To review and assess conventional sphericity testing methods for real-time interferometry.
    • To investigate the application of a specific method to phase-stepping interferometry.
    • To analyze measurement errors and introduce noise reduction techniques.

    Main Methods:

    • Review of conventional absolute sphericity testing techniques.
    • Application and examination of a chosen method in phase-stepping interferometry.
    • Analysis of measurement errors, including coherent noise.
    • Development of a digital spatial filtering technique for noise reduction.

    Main Results:

    • Assessment of conventional methods' suitability for real-time interferometry.
    • Experimental results of deviation measurements on normal surfaces.
    • Identification and analysis of measurement errors, particularly coherent noise.
    • Demonstration of a digital spatial filtering technique for noise diminution.

    Conclusions:

    • Certain conventional methods are suitable for real-time interferometry.
    • Phase-stepping interferometry can be effectively used for sphericity testing.
    • Digital spatial filtering significantly reduces coherent noise in measurements.