Spectral reflectance measurements using a precision multiple reflectometer in the UV and VUV range

Area of Science:

• Optics and Photonics
• Materials Science
• Spectroscopy

Background:

• Accurate measurement of optical properties is crucial for material characterization and device performance.
• Existing methods for measuring reflectivity and transmissivity in the UV-VUV range face limitations in accuracy and precision.

Purpose of the Study:

• To develop and validate a novel instrument for high-accuracy absolute reflectivity measurements.
• To extend the measurement capabilities to transmissivity within the UV and VUV spectral range.
• To assess the performance of the instrument across a range of incident angles.

Main Methods:

• Utilized an imaging folded cavity design for enhanced optical feedback.
• Developed a measurement protocol for absolute reflectivity and transmissivity.
• Calibrated the instrument using known standards.

Main Results:

• Achieved an absolute reflectivity accuracy of better than 5 x 10(-3).
• Demonstrated a precision of better than 5 x 10(-4) for reflectivity measurements.
• Successfully measured optical properties across incident angles from 5 to 70 degrees.

Conclusions:

• The imaging folded cavity instrument provides a highly accurate and precise method for UV-VUV optical property measurements.
• The instrument is versatile, capable of measuring both reflectivity and transmissivity.
• This advancement facilitates improved material analysis and optical system design.