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Evaluation of alternative algorithms for dynamic imaging microellipsometry.

R F Cohn

    Applied Optics
    |June 18, 2010
    PubMed
    Summary
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    Four radiometric algorithms for dynamic imaging microellipsometry were evaluated. Exact solutions are recommended for high-speed thin film analysis, while Fourier series offer higher accuracy.

    Area of Science:

    • Materials Science
    • Optical Physics
    • Surface Science

    Background:

    • Dynamic imaging microellipsometry is a rapid, full-field imaging technique for thin film characterization.
    • Accurate radiometric algorithms are crucial for reliable thin film analysis using microellipsometry.
    • Evaluating alternative algorithms is necessary to optimize performance for different applications.

    Purpose of the Study:

    • To investigate and compare four alternative radiometric algorithms for dynamic imaging microellipsometry.
    • To assess the performance of exact solutions versus a Fourier series approach.
    • To determine the suitability of each algorithm for high-speed and high-accuracy applications.

    Main Methods:

    • Development and presentation of three exact radiometric solutions.

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  • Implementation and analysis of a Fourier series approach for radiometric calculations.
  • Comparison of algorithms based on random and systematic errors (Delta and psi) and processing requirements.

    • Main Results:

    • Random errors were approximately 0.3 degrees rms for Delta and 0.06 degrees rms for psi.
    • Systematic error differences were around 0.4 degrees for Delta and 0.15 degrees for psi.
    • Processing requirements for the algorithms were found to be generally similar.

    Conclusions:

    • The three-image exact solution algorithms are recommended for high-speed dynamic imaging microellipsometry applications.
    • The Fourier series approach is recommended for applications demanding higher accuracy in thin film analysis.
    • Algorithm choice depends on the trade-off between speed and accuracy requirements.