Evaluation of alternative algorithms for dynamic imaging microellipsometry

An investigation of four alternative radiometric algorithms for dynamic imaging microellipsometry (a rapid full field imaging technique for thin films) is reported. Three exact solutions and a Fourier series approach are presented and compared in terms of random and systematic errors and processing requirements. Variations in performance based on assumed system specifications are of the order of 0.3 and 0.06 degrees rms random error for Delta and psi, respectively, with systematic error differences around 0.4 degrees for Delta and 0.15 degrees for psi. Processing requirements are generally similar. The three-image algorithms are recommended for high speed applications and the Fourier series for high accuracy.