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Characterization of Ultra-fine Grained and Nanocrystalline Materials Using Transmission Kikuchi Diffraction
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Published on: April 1, 2017

Principles of depth-resolved Kikuchi pattern simulation for electron backscatter diffraction.

A Winkelmann1

  • 1Max-Planck-Institut für Mikrostrukturphysik, Halle (Saale), Germany. winkelm@mpi-halle.mpg.de

Journal of Microscopy
|June 29, 2010
PubMed
Summary
This summary is machine-generated.

This study explains depth-dependent Kikuchi pattern formation in scanning electron microscopy. Understanding electron scattering depth is key for quantitative analysis of electron backscatter diffraction patterns.

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Area of Science:

  • Materials Science
  • Physics
  • Electron Microscopy

Background:

  • Kikuchi patterns in electron microscopy arise from electron diffraction.
  • Depth-dependent scattering influences observed patterns.
  • Understanding these principles is crucial for materials characterization.

Purpose of the Study:

  • To provide a tutorial on depth-dependent Kikuchi pattern formation.
  • To compare electron backscatter diffraction (EBSD) and transmission electron microscopy (TEM) Kikuchi band formation.
  • To elucidate the relationship between EBSD and convergent beam electron diffraction (CBED).

Main Methods:

  • Simulations using dynamical theory of electron diffraction.
  • Comparison of EBSD and TEM Kikuchi pattern formation.
  • Calculation of depth-resolved Kikuchi patterns.
  • Comparison of experimental EBSD patterns with simulations.

Main Results:

  • EBSD and TEM Kikuchi band formation share similarities explained by dynamical diffraction theory.
  • Depth-dependent diffuse electron scattering significantly impacts EBSD contrast and intensity.
  • Simulations reveal the necessity of considering electron scattering depth for quantitative EBSD analysis.

Conclusions:

  • The depth distribution of backscattered electrons is critical for accurate quantitative descriptions in EBSD.
  • Quantitative depth-dependent information can be extracted from EBSD patterns by integrating dynamical diffraction simulations and Monte Carlo models.