Complex permittivity measurements using cavity perturbation technique with substrate integrated waveguide cavities

Cavity perturbation technique is widely used in the measurements of complex dielectric permittivity of materials due to its accuracy and ease of configuration. This paper presents the theoretical formulas for the evaluation of complex permittivity of materials using cavity perturbation technique with substrate integrated cavity resonators. With the proposed formulas, the use of various planar cavities is possible by taking into account the dielectric characteristics of the substrate in which the cavity is implemented. Simulations and measurements are performed on various dielectric samples to validate the proposed theory. The maximum deviation in the measured dielectric permittivity values is below 6% compared to the literature values. The implemented substrate integrated cavity is then analyzed in terms of sensitivity, showing a good performance.