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Related Experiment Video

Updated: Jun 10, 2026

Fabrication And Characterization Of Photonic Crystal Slow Light Waveguides And Cavities
11:08

Fabrication And Characterization Of Photonic Crystal Slow Light Waveguides And Cavities

Published on: November 30, 2012

Low loss shallow-ridge silicon waveguides.

Po Dong1, Wei Qian, Shirong Liao

  • 1Kotura Inc., 2630 Corporate Place, Monterey Park, CA 91754, USA. pdong@kotura.com

Optics Express
|July 20, 2010
PubMed
Summary

We achieved low propagation loss in shallow-ridge silicon waveguides, averaging 0.274 dB/cm in the C-band. This advancement enables efficient light coupling for integrated photonic circuits.

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Area of Science:

  • Photonics
  • Materials Science
  • Electrical Engineering

Background:

  • Silicon photonics is crucial for integrated circuits.
  • Minimizing signal loss in waveguides is essential for device performance.

Purpose of the Study:

  • To demonstrate low-loss shallow-ridge silicon waveguides.
  • To investigate efficient light coupling methods for integrated photonic devices.

Main Methods:

  • Fabrication using standard photolithography and dry etching.
  • Characterization of propagation loss in the C-band (1530 nm - 1565 nm).
  • Design and analysis of a compact double-level taper for adiabatic coupling.

Main Results:

  • Achieved an average propagation loss of 0.274 ± 0.008 dB/cm.

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  • Waveguides with a cross-section of 0.25 µm by 2 µm were fabricated.
  • Demonstrated adiabatic coupling to silicon strip waveguides using a double-level taper.

    • Conclusions:

    • Shallow-ridge silicon waveguides offer low propagation loss.
    • The developed taper enables efficient light transfer for compact photonic circuits.
    • These results contribute to advancements in silicon photonic integrated circuits.