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Implementation of a Reference Interferometer for Nanodetection

Implementation of a Reference Interferometer for Nanodetection

Published on: April 26, 2014

Vibration-desensitized interferometer by continuous phase shifting with high-speed fringe capturing.

Jungjae Park¹, Seung-Woo Kim

¹Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology (KAIST), Science Town, Daejeon 305-701, South Korea.

|July 29, 2010

Summary

Optical interferometers need vibration immunity for field use. A new continuous phase-shifting method suppresses vibration by locking the interference phase to a single frequency for vibration-free recovery using Fourier analysis.

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Area of Science:

Optical metrology
Vibration analysis

Background:

Optical interferometers are crucial for surface metrology.
Laboratory environments offer controlled conditions, but field applications require high vibration immunity.

Purpose of the Study:

To develop a vibration suppression technique for optical interferometers used outside laboratory settings.
To enable accurate surface metrology in environments with significant vibrations.

Main Methods:

Implementation of a continuous phase-shifting method.
Uninterrupted phase shifting synchronized with high-rate fringe capture.
Utilizing Fourier-based postprocessing for data analysis.

Main Results:

The continuous phase-shifting method effectively locks the interference initial phase to a single temporal frequency.
Vibration-induced phase errors are eliminated through Fourier analysis.
The method demonstrated successful vibration suppression in optical interferometry.

Conclusions:

Continuous phase shifting offers a robust solution for vibration suppression in optical surface metrology.
This technique enhances the applicability of interferometers in non-laboratory environments.
The method is compatible with existing phase-shifting interferometers and high-speed digital cameras.