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3D Depth Profile Reconstruction of Segregated Impurities Using Secondary Ion Mass Spectrometry
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Deconvolution of charged particle spectra from neutron depth profiling using Simplex method

V Hnatowicz1, J Vacík, D Fink

  • 1Nuclear Physics Institute, Academy of Sciences of the Czech Republic, 250 68 Rez, Czech Republic. hnatowicz@ujf.cas.cz

The Review of Scientific Instruments
|August 7, 2010
PubMed

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