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Updated: Jun 10, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Real-time holographic phase organization technique to obtain customized contouring of diffuse surfaces
Abstract:
We report on the development of a holographic technique which allows one to obtain real time holographic fringes that reveal the whole field contour map of an arbitrary shaped object. The method enables one to generate sensitivities compatible with the relief variations of objects of broadly varying depths. This is achieved by supplying enough 3-D modulation capacity to the system to develop the desired sensitivity. The intersection planes can be pivoted to provide for an oblique slicing of the model. We describe the basic optical configuration and discuss the system parameters. Experimental results are presented to illustrate the effectiveness of the method.
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