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Scintillation SE detector for variable pressure scanning electron microscopes
1Institute of Scientific Instruments of ASCR, Královopolská, Czech Republic. jirak@feec.vutbr.cz
Journal of Microscopy
|August 13, 2010
Summary
A novel scintillation detector for variable pressure scanning electron microscopy allows high vacuum in the detector while maintaining high pressure around the specimen. This design enables efficient secondary electron detection for diverse sample observations.
Area of Science:
- Materials Science
- Electron Microscopy
- Physics
Background:
- Variable pressure scanning electron microscopy (VP-SEM) allows imaging under non-vacuum conditions.
- Detecting secondary electrons at high VP-SEM pressures is challenging due to gas scattering.
Purpose of the Study:
- To introduce a new scintillation detector for secondary electrons in VP-SEM.
- To enable high-pressure specimen observation with efficient electron detection.
Main Methods:
- A scintillation detector with a single crystal scintillator housed in a separate chamber.
- Two apertures creating an electrostatic lens to guide electrons.
- Differential pressure control between specimen and scintillator chambers.
Main Results:
- The detector maintains low pressure (Pa) in the scintillator chamber while the specimen chamber is at high pressure (1000 Pa).
- High voltage (kV) can be applied to the scintillator for efficient secondary electron detection.
- The apertures form an electrostatic lens, facilitating electron transfer.
Conclusions:
- The new detector design is effective for VP-SEM.
- It offers promising capabilities for observing a wide range of specimens under variable pressure conditions.
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