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Updated: Jun 10, 2026

Demonstration of a Hyperlens-integrated Microscope and Super-resolution Imaging
Published on: September 8, 2017
A study on the realization of high resolution solid immersion lens-based near-field imaging optics by use of an
Hyungbae Moon1, Yong-Joong Yoon, Wan-Chin Kim
1Center for Information Storage Device, Yonsei University, 262 Seongsanno, Seodaemun-gu, Seoul 120-749, Korea.
Abstract:
We report on the realization of solid immersion lens (SIL)-based near-field (NF) optics with an annular aperture, which is targeted to achieve high optical resolution. A numerical aperture (NA) = 1.84 hemisphere SIL-optics with an annular aperture achieves higher optical resolution than the conventional NA = 2.0 SIL-optics. The designed aperture is fabricated by photo-lithography and dry-etching technique. Experimental verification of the designed optics was performed through beam spot profile measurement under NF imaging conditions. A 15% smaller full-width-at-half-maximum spot diameter is obtained by the aperture. We verified that this method gives an improvement of the resolution in the optical imaging systems requiring higher resolution.

