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Updated: Jan 18, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Digital holography free of 2π ambiguity, using coherence modulation
Abstract:
In this Letter, a quantitative measurement method with an extended axial range in low-coherence light digital holography is presented. Based on the characteristics of the light source, the degree of coherence and phase values are obtained. Because the degree of coherence is modulated with respect to the optical path difference, it can be used to remove the 2π ambiguity of the phase, without the use of numerical or dual-wavelength methods. The mathematical procedures from three phase-shifting holograms are numerically described. From experimental results, the accurate measurements of a sample with high step are presented to confirm the effectiveness.
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