An operating method with lateral scan for reducing the error in topography caused by the tip-sample angle in atomic

Fa-Quan Zhou1, Xue-Zeng Zhao, Fei Wang

  • 1School of Mechatronic Engineering, Harbin Institute of Technology, Harbin, Heilongjiang Province 150001, China.

Summary

Atomic force microscopy (AFM) topographic imaging errors caused by tip-sample angle changes are reduced using a new lateral scan method. This technique improves the accuracy of AFM measurements, particularly in challenging scan regions.