Oxygen close-packed structure in amorphous indium zinc oxide thin films

Tatsuya Eguchi1, Hiroyuki Inoue, Atsunobu Masuno

  • 1Institute of Industrial Science, the University of Tokyo, 4-6-1 Komaba, Meguro-ku, Tokyo, 153-8505 Japan.

Inorganic Chemistry
|August 26, 2010
PubMed
Summary

Amorphous indium zinc oxide (IZO) thin films exhibit enhanced stability due to zinc ions occupying tetrahedral sites. This structural arrangement in IZO films influences ordering and stability, confirmed by X-ray diffraction and molecular dynamics simulations.