Examination of the polished surface character of fused silica

Investigation of the surface character of fused silica polished with various compounds dispersed in water identified pH 4 as the optimum condition for high quality. Analyses support the conclusion that at this pH redeposition of hydrated material onto the surface during polishing is limited. Comparative polishing results for Zerodur are included. Improvement of the laser-damage threshold of a coating on the pH 4 polished fused silica is suggested.