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Updated: Jun 8, 2026

Accumulation and Analysis of Cuprous Ions in a Copper Sulfate Plating Solution
Published on: March 20, 2019
Influence of anion on the kinetics of copper island growth
1Department of Materials Science and Engineering, Johns Hopkins University, Baltimore, MD 21218, USA.
Abstract:
We compare the kinetics of copper island growth in the kinetic regime in the presence and absence of anion adsorption and show that the growth exponents are inconsistent with a direct attachment model. In sulfate solution, anion adsorption leads to instantaneous nucleation, equal lateral and vertical growth exponents, and suppressed vertical growth. In perchlorate solution, island growth is characterized by progressive nucleation, enhanced vertical growth, and different lateral and vertical growth exponents. Avrami analysis and analysis of the surface power spectra suggest that island growth is controlled by surface diffusion to the island perimeter.
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