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Updated: Jun 8, 2026

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Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Electronic speckle pattern interferometry and digital holographic interferometry with microbolometer arrays at 10.6
Jean-François Vandenrijt1, Marc P Georges
1Centre Spatial de Liège-Université de Liège, Avenue du Pré-Aily, B-4031 Angleur, Belgium.
Applied Optics
|September 22, 2010
Summary
Long infrared wavelengths enhance electronic speckle pattern interferometry and digital holographic interferometry, extending measurement range and reducing sensitivity to disturbances. These techniques were demonstrated on solid object rotation measurements.
Area of Science:
- Optics and Photonics
- Metrology
- Experimental Physics
Background:
- Traditional interferometry techniques face limitations in measurement range and sensitivity to environmental noise.
- Infrared wavelengths offer potential advantages for extending interferometric capabilities.
Purpose of the Study:
- To investigate the application of long infrared wavelengths in electronic speckle pattern interferometry (ESPI) and digital holographic interferometry (DHI).
- To explore the benefits of extended measurement range and reduced sensitivity to perturbations.
- To analyze the impact of long wavelengths on object surface reflection characteristics.
Main Methods:
- Utilized a CO(2) laser emitting at 10.6 μm for infrared interferometry.
- Employed microbolometer arrays for infrared detection.
- Developed experimental configurations for phase-shifting ESPI (in-plane and out-of-plane) and lensless DHI.
- Performed rotation measurements on a solid object.
Main Results:
- Demonstrated the feasibility of ESPI and DHI at long infrared wavelengths (10.6 μm).
- Showcased phase-shifting ESPI for both in-plane and out-of-plane measurements.
- Successfully implemented lensless DHI for rotation measurements.
- Observed and discussed the altered reflection behavior of object surfaces at these wavelengths.
Conclusions:
- Long infrared wavelengths are effective for enhancing ESPI and DHI.
- These long-wavelength interferometric techniques offer extended measurement ranges and improved robustness against external perturbations.
- The study validates the use of 10.6 μm CO(2) laser-based interferometry for precise metrology applications.

