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Subsurface Defect Localization by Structured Heating Using Laser Projected Photothermal Thermography

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Laser driver for soft-x-ray projection lithography.

L A Hackel, R J Beach, C B Dane

|September 22, 2010

Summary

This summary is machine-generated.

A novel diode-pumped Neodymium-doped Yttrium Aluminum Garnet (Nd:YAG) laser was designed for soft-x-ray projection lithography. This laser system achieves high pulse energy and repetition rate, crucial for advanced lithography applications.

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Area of Science:

Laser Physics
Optical Engineering
Materials Science

Background:

Soft-x-ray projection lithography requires high-power, short-pulse laser drivers.
Existing laser technologies may not meet the stringent requirements for advanced lithography.

Purpose of the Study:

To design a diode-pumped Nd:YAG laser system optimized for soft-x-ray projection lithography.
To achieve specific performance metrics including high pulse energy, short pulse duration, and high repetition rate.

Main Methods:

Utilized microchannel-cooled diode laser arrays for efficient pumping.
Incorporated zigzag slab energy storage for enhanced thermal management and energy extraction.
Employed a regenerative amplifier cavity with phase conjugator beam correction for superior beam quality.
Implemented stimulated Brillouin scattering pulse compression to achieve the desired nanosecond pulse duration.

Main Results:

The designed laser system is capable of delivering up to 1 Joule of energy per pulse.
Achieved a pulse duration between 2 to 5 nanoseconds.
Operates at a pulse repetition rate of 400 Hz.
Near-diffraction-limited beam quality is maintained through phase conjugator beam correction.

Conclusions:

The developed diode-pumped Nd:YAG laser design meets the demanding specifications for driving soft-x-ray projection lithography systems.
The integration of advanced techniques like phase conjugation and stimulated Brillouin scattering ensures high performance and beam quality.