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Convergent Polishing: A Simple, Rapid, Full Aperture Polishing Process of High Quality Optical Flats & Spheres

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Float-polishing process and analysis of float-polished quartz.

S F Soares, D R Baselt, J P Black

|September 24, 2010

Summary

This summary is machine-generated.

A novel fluid-mechanical model explains float-polishing, creating supersmooth, damage-free surfaces on quartz substrates. This process minimizes subsurface damage for high-stress applications.

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Area of Science:

Fluid mechanics
Materials science
Surface engineering

Background:

Float-polishing is a lapping-polishing technique used for achieving ultra-smooth surfaces.
Understanding the fluid dynamics is crucial for optimizing the process and surface quality.

Purpose of the Study:

To develop a fluid-mechanical model for the float-polishing process.
To investigate the relationship between fluid flow, surface generation, and subsurface integrity.

Main Methods:

Developed a fluid-mechanical model based on laminar flow principles.
Float polished quartz substrates, removing 100 µm of material.
Analyzed polished surfaces using optical scatterometry, photoacoustic spectroscopy, and atomic force microscopy.

Main Results:

The model predicts pressure gradients that support the sample on a fluid layer.
Laminar fluid motion was found to produce supersmooth, damage-free surfaces.
Float-polished quartz exhibited low subsurface damage and a surface roughness of approximately 0.2-nm rms.

Conclusions:

The developed fluid-mechanical model accurately describes the float-polishing mechanism.
Float polishing is effective in producing high-quality surfaces with minimal damage for demanding applications.