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High-resolution, High-speed, Three-dimensional Video Imaging with Digital Fringe Projection Techniques

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High-accuracy profiler that uses depth from focus.

P W Fieguth, D H Staelin

|September 24, 2010

Summary

A new confocal microscope system accurately measures 3D surface profiles. It achieves 1 µm depth resolution and 0.1 µm precision on mirrored surfaces, enabling detailed surface metrology.

Area of Science:

Optical Metrology
Surface Science
Microscopy

Background:

Accurate 3D surface profiling is crucial in various scientific and industrial fields.
Existing methods may have limitations in resolution, precision, or field of view.

Purpose of the Study:

To report a novel Charge-Coupled Device (CCD)-based confocal microscope system.
To demonstrate its capability for accurate three-dimensional (3D) surface profile measurements.

Main Methods:

Utilized a CCD-based confocal microscope system.
Employed smooth specular test objects for evaluation.
Measured surface samples with specified spacing and field of view.

Main Results:

Achieved depth resolution of approximately 1 µm for a 500 µm field of view.

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Obtained a precision of 0.1 µm on a mirrored surface with a 400 µm field of view.

Demonstrated simultaneous resolution of surface samples spaced at 12 µm.

Conclusions:

The developed CCD-based confocal microscope system provides accurate 3D surface profile measurements.
The system offers high resolution and precision suitable for detailed surface metrology.
Results are scalable to different apparatus dimensions and sampling intervals.