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Emergent chemical mapping at atomic-column resolution by energy-dispersive x-ray spectroscopy in an

M-W Chu1, S C Liou, C-P Chang

  • 1Center for Condensed Matter Sciences, National Taiwan University, Taipei 106, Taiwan.

Physical Review Letters
|September 28, 2010
PubMed

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Scanning Electron Microscopy

A scanning electron microscope (SEM) is used to study the surface features of a sample by using an electron beam that scans the sample surface in a two-dimensional manner. Typically, areas between ~1 centimeter to 5 micrometers in width can be imaged. SEM can be used to image bacteria, viruses, tissues as well as larger samples like insects. Conventional SEM gives a magnification ranging from 20X to 30,000X and spatial resolution of 50 to 100 nanometers.
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