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Updated: Jun 8, 2026

Fabrication and Characterization of Thickness Mode Piezoelectric Devices for Atomization and Acoustofluidics
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Fabrication and Characterization of Thickness Mode Piezoelectric Devices for Atomization and Acoustofluidics

Published on: August 5, 2020

PZT transduction of high-overtone contour-mode resonators

Hengky Chandrahalim1, Sunil A Bhave, Ronald G Polcawich

  • 1School of Electrical and Computer Engineering, Cornell University, Ithaca, NY, USA. hengky.chandrahalim@micro.mavt.ethz.ch

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
|September 30, 2010
PubMed

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