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Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
Published on: February 4, 2018
A new method of Q factor optimization by introducing two nodal wedges in a tuning-fork/fiber probe distance sensor
Kyoung-Duck Park1, Dae-Chan Kim, Beom-Hoan O
1Department of Information and Communication Engineering, INHA University, Incheon 402-751, South Korea.
Abstract:
We report on a new method of achieving and optimizing a high Q factor in a near-field scanning optical microscope (NSOM) by introducing two nodal wedges to a tuning-fork/fiber probe distance sensor and by selecting a vibrational mode of the dithering sensor. The effect of the nodal wedges on the dynamical properties of the sensor is theoretically analyzed and experimentally confirmed. The optimization achieved by the proposed method is understood from the vibration isolation and the subsequent formation of a local vibration cavity. The optimal condition is found to be less susceptible to the variation of the fiber tip length. This method allows effective NSOM measurement of samples placed even in aqueous solution.

